Acknowledged as one of the most demanding processes in the industry, Silicon Nitride etching requires a thorough knowledge on the chemistry involved as well as the specific requirements. Therefore, learning to understand the principles behind this approach is helpful particularly to those who are in the semiconductor industry.
So, how it is carried out? The process includes the following:
*Preparing the material for appropriate temperature exposure where the goal is to achieve the greatest etch rates and best selectivity, which is in fact not impossible as long as the phosphoric acid has the highest ratio of water at a given temperature.
*The installation/ integration of water addition system , which is the way to keep ideal amount of water into the system.
* The use of closed system (e.g. Imtec's Nitride Etch Accubaths) for precised control of temperature as well as the acid concentrations
* To help ensure that uniformed conditions are made through the bath, which is the key to achieve a precisely controlled etch rate and the best possible selectivity, a close refluxing system is used.
* To help ensure that the liquid and fume do not cross the boundary of the heater area, a particular component that acts as a barrier between the harsh environment and the sealant is used - like the Aquaseal from Accubath. This technique helps eliminate the most common failure mode seen on heated wet process tanks.
Silicon Nitride Etching - The industry benefits
The production of Silicon Nitride films provides a number of benefits particularly to the semiconductor industry as it contributes to several important applications, including the following:
* for the manufacturing of integrated circuits, which are an important component to many electronic devices that can be found in the market today.
* utilized as masking layers for local oxidation of silicon.
* used as an electrical insulator as it has a comparatively high dielectric current
In addition to helping the semiconductor industry, Silicon Nitride etching play a significant role in other industries as well such as in automobile where it is applied to engine parts; bearings (e.g. ceramic bearings, which have a good resistance to shocks; and medical industry as it is used in many medical applications such as an alternative to titanium.
So, how it is carried out? The process includes the following:
*Preparing the material for appropriate temperature exposure where the goal is to achieve the greatest etch rates and best selectivity, which is in fact not impossible as long as the phosphoric acid has the highest ratio of water at a given temperature.
*The installation/ integration of water addition system , which is the way to keep ideal amount of water into the system.
* The use of closed system (e.g. Imtec's Nitride Etch Accubaths) for precised control of temperature as well as the acid concentrations
* To help ensure that uniformed conditions are made through the bath, which is the key to achieve a precisely controlled etch rate and the best possible selectivity, a close refluxing system is used.
* To help ensure that the liquid and fume do not cross the boundary of the heater area, a particular component that acts as a barrier between the harsh environment and the sealant is used - like the Aquaseal from Accubath. This technique helps eliminate the most common failure mode seen on heated wet process tanks.
Silicon Nitride Etching - The industry benefits
The production of Silicon Nitride films provides a number of benefits particularly to the semiconductor industry as it contributes to several important applications, including the following:
* for the manufacturing of integrated circuits, which are an important component to many electronic devices that can be found in the market today.
* utilized as masking layers for local oxidation of silicon.
* used as an electrical insulator as it has a comparatively high dielectric current
In addition to helping the semiconductor industry, Silicon Nitride etching play a significant role in other industries as well such as in automobile where it is applied to engine parts; bearings (e.g. ceramic bearings, which have a good resistance to shocks; and medical industry as it is used in many medical applications such as an alternative to titanium.
About the Author:
Paul Drake has had long years working in a high tech firm before venturing on the Internet as a freelance writer. He leverages his prior experience to write a wide variety of topics including wet process and Silicon Nitride Etching. He also manages his own blog, which reflects his on the Internet current works.